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Laboratory 2-target DC magnetron metal sputter PVD coating machine

  • Origin: China
  • Supply Type: in stock
  • Processing Time: 30days
  • Min Order: 1

Quick Details

Sample stage Diam185mm
Sputtering target head 2-inch
Chamber size Diam300mm×300mm
Chamber material Stainless steel
Molecular pump 600L/S
Rotary vane pump 1.1L/S
DC power supply 500W*2
Supply voltage AC220V,50Hz
Overall size 600mm×650mm×1280mm
Total Weight About 300kg

Supplier Info.

  • Company Name Zhengzhou CY Scientific Instrument Co.,
  • Membership:Free
  • Business Type: Manufacturer, Trading Company, Buying Office, Agent, Distributor/Wholesaler, Government ministry/Bureau/Commission, Association, Business Service (Transportation, finance, travel, Ads, etc), Other
  • Employees Total
  • Annual Revenue

Dual-target DC magnetron sputtering coater CY-MSP300S-2DC

Dual-target DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with two 500W DC power supply. The DC power supply can be used for the preparation of metal film. The two targets can meet the needs of multi-layer or multiple coatings.

The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.

Dual-target DC magnetron sputtering coater application:

This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Dual-target DC magnetron sputtering coater technical parameters:

Sample stage

Size: diam185mm

Temperature control accuracy:+-1 degree Celsius

Heating temperature:Max 500 degree Celsius

Rotate speed:1-20rpm adjustable

Magnetron Sputtering target head

Quantity:2-inch*2 (1-inch,2-inch optional)

Water chiller:Circulating water chiller with flow rate of 10 L/min

Cooling mode:Water cooling

Vacuum chamber

Chamber size:300mm * 300mm

Watch window:diam 100mm

Chamber material:Stainless steel

Opening mode:Top cover open

Mass flowmeter

2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)

Vacuum system

Model:CY-GZK103-A

Pumping interface:KF40

Molecular pump:CY-600

Exhaust interface:KF16

Backing pump:rotary vane pump

Vacuum measurement:Compound vacuum gauge

Ultimate vacuum:1.0E-5Pa

Power supply:AC;220V 50/60Hz

Pumping rate:Molecular pump: 600L/S rotary vane pump: 1.1L/S

Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes

Power configuration

DC power supply*2;Max output power:DC 500W

Other parameters

Supply voltage:AC220V,50Hz

Overall size: