Magnetron Sputtering is widely used to deposit refractory metals like tantalum, titanium, tungsten, niobium, which would require very high temperatures of deposition, and precious metals: Gold and Silver and which is also used for deposition of lower melting points metals like copper, aluminum, nickle, chrome etc.
Tantalum is most used in the electronic industry as a protective coating because of its good resistance to erosion.
Applications of Sputtered Tantalum thin film:1. Microelectronics industry as the films can be reactively sputtered and thus resistivity and temperature coefficient of resistance can be controlled;
Technical Advantages
Royal Technology’s standardized Tantalum sputtering deposition system:
| Main Configurations | |
| MODEL | RTAS1000 |
| TECHNOLOGY | Pulsed DC magnetron sputtering Cathodic arc plating (for option, determined by coating process) |
| CHAMBER MATERIAL | Stainless Steel (S304) |
| CHAMBER SIZE | Φ1000*1000mm (H) |
| CHAMBER TYPE | D shape, cylindrical chamber |
| ROTATION RACK & JIG SYSTEM | Satellite driving or central driving system |
| POWER SUPPLIES | DC Sputtering Power Supply: 2~4 setsBias Power supply: 1 set Ion Source: 1 set |
| DEPOSITION MATERIAL | Ta, Ti/Cr/TiAl, Au, Ag, Cu etc. |
| DEPOSITION SOURCE | Planar Sputtering Cathodes + circular arc cathodes |
| CONTROL | PLC(Programmable Logic Controller) + IPC( manual+ auto+ semi-auto operation models) |
| PUMP SYSTEM | Rotary Vane Pump: SV300B – 1 set (Leybold) |
| Roots Pump: WAU1001 – 1 set (Leybold) | |
| Holding Pump: D60C – 1 set (Leybold) | |
| Magnetic Suspension Molecular Pump:MAG2200 – 2 sest (Leybold) | |
| GAS MASS FLOW CONTROLLER | 2 channels: Ar and N2 |
| VACUUM GAUGE | Inficon or Leybold |
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipmen |
| HEATING | Heaters: 20KW. Max. temp.: 450℃ |
| COOLING | Industrial Chiller (Cold Water) |
| POWER MAX. | 100KW (Approx.) |
| AVERAGE POWER CONSUMPTION | 45 KW (Approx.) |
| GROSS WEIGHT | T (Approx.) |
| FOOT PRINT | ( L*W*H) MM |
| ELECTRICAL POWER | AC 380V/3 ses/50HZ / 5 div> |
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