| FZ Silicon Polished Wafer • Diameter (mm) ： 76.2 - 150 • Dia& tolerance (mm)： X±0.3 or According to the customer • Type/ Dopant： N-type (NTDã€GD) / P-type(B) • Orientation： ＜111＞ / ＜100＞ • Resistivity（Ω. cm）： 10 - 10000 • Oxygen content (at cm-3 )： ≤1×1016 • Carbon content (at cm-3 )： ≤2×1016 • Thickness& tolerance (um)： Based on customer spec. • Surface Condition: Double side polished • Other parameters: According to the SEMI standard or the customer |
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