| CZ Silicon Polished Wafer • Diameter (mm) ： 76.2 - 150 • Dia& tolerance (mm)： X±0.3 or According to the customer spec. • Type/ Dopant： N-type (Pã€Asã€Sb) / P-type(B) • Orientation： ＜111＞ / ＜100＞ • Resistivity（Ω. cm）： 0.001 - 60 • RRG（%）： N-type ≤ 18% P-type ≤ 10% • Oxygen content (at cm-3 )： ≤1×1018 • Carbon content (at cm-3 )： ≤5×1016 • Thickness& tolerance (um)： Based on customer spec. • Surface Condition: Single side polished • Other parameters: According to the SEMI standard or the customer |
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