SiC Wafer Focus Ring
Key Features
1. Protects wafer during the etching process of engraving circuits on wafer.2. Prevents from being different the depth of the circuit engraved on the wafer surface 3. Has a similar dielectric constant of conduction can minimize the influence on Wafer4. The life time of focus ring increases, as it has exnt sical/chemical proporties and stronger hardness than Si focus ring.5. Completed the construction of a three-dimensional measuring instrument to accurately measure the manufactured product and completed the inspection system
Advantages
1. Manufactured in own factory2. Honest price through direct production/distribution3. It Has less risk of contamination in the chamber when replacing the ring.4. The replacement cycle of SiC ring is about 15~20 days (Si Ring is about 10~12 days)
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Specification
| Product Name | SiC Wafer Focus Ring |
| Brand Name | Semidia |
| Width | Outer diameter : Ø311.78 (±0.05) (mm)Inner diameter : Ø296.44 (±0.05) (mm) |
| Material | SiC |
| Origin | Republic of Korea |
