high vacuum 5.0x10-8 Torr (vacuum system dependent)low vaccum degree Leak Rate: <1.0x10-8 cc/sec Hehigh safety Rigorous and complete slot valve/process module/robot hardware interlock design;Passing SemiS2 security certificationLocalization advantageBased on Brooks classic VTM, independently developed a complete set of solutions, stable and reliable; Performance is consistent with Brooks VTM;TMC software system independent research and development, support customer customized needs local manufacturing capabilities, short delivery time, stable supplyLocalization professional technical service team, quick response
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