Precise and reliable motion control with the same performance as Asyst SMIFTransmission cycle s; Repositioning accuracy 0.127mm; The cleanade is better than Class 1; The direction error is mmMature and stable Interlock systemWafer traceability identification system SMART TAGIntegrated self-test diagnostics, as well as advanced diagnostic software, facilitate design and troubleshootingLocalization advantageShort delivery time, stable supplyLocal manufacturing capability, fast and flexible; Localization of core components fast response