EFEM/Sorter Semiconductor wafer transmission equipment high speed high reliablity super clean320 pieces/hour, with wafer reading function 1,100 pieces/hour, without wafer reading function Key components MCBF 15,000,000 times Clean grade: ISO class1 PWP indicator: [email protected]μmCan be used for various layouts (2~10 loading ports) 100/150/200/300mm wafer sorting machine capabilities (supporting multiple compatibility modes), supporting customized software and special functions Local manufacturing capabilities, fast and flexible selection and stocking of core components Professional technical and service team, fast on-site processing