Used
Warranty: 3 months
Module 772-082235-001
Product Description
The LAM Research 772-082235-001 Pressure Regulating Valve is a precision pressure regulating valve designed for use in semiconductor processing applications.
It is designed to provide precise control of pressure and flow in a wide range of applications, including etch, deposition, and CVD processes.
The valve features an adjustable set point range from 0 to 10 PSI, a maximum operating pressure of 30 PSI, and a maximum flow rate of 5 SLPM.
It also has an integrated shutoff valve for safety.
The valve is constructed from stainless steel and is compatible with most common gases used in semiconductor processing.