Quick Details
- Sample stage:diam185mm
- Sputtering target head:2-inch
- Chamber size:diam300mm×300mm
- Chamber material:Stainless steel
- Molecular pump:600L/S
- rotary vane pump:1.1L/S
- DC power supply:500W*2
- Supply voltage:AC220V,50Hz
- Overall size:600mm×650mm×1280mm
- Total Weight:About 300kg
- Processing Time:30days
- Port:qingdao,shanghai,
- Supply Ability: 50 Sets Per Month
- Brand Name:CYKY
- Classification:lab vacuum pvd
- Model Number:CY-MSP300S-2DC
- Place of Origin:zhengzhou,henan,china
- Brand Name:CYKY
Dual-target DC magnetron
sputtering coater CY-MSP300S-2DC
Dual-target DC magnetron sputtering
coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron
targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with two 500W DC power supply. The DC power supply can be
used for the preparation of metal film. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel
high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements.
The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is
controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with
an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further
improve your experimental efficiency.
Dual-target DC magnetron
sputtering coater application:
This device can be used for preparing
single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely
used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Dual-target DC magnetron
sputtering coater technical parameters:
Sample stage
Size: diam185mm
Temperature control accuracy:+-1 degree Celsius
Heating temperature:Max 500 degree Celsius
Rotate speed:1-20rpm adjustable
Magnetron Sputtering target head
Quantity:2-inch*2 (1-inch,2-inch optional)
Water chiller:Circulating water chiller with flow rate of 10 L/min
Cooling mode:Water cooling
Vacuum chamber
Chamber size:300mm * 300mm
Watch window:diam 100mm
Chamber material:Stainless steel
Opening mode:Top cover open
Mass flowmeter
2 channels; measuring range 100SCCM; 100SCCM (can be
customized according to customer needs)
Vacuum system
Model:CY-GZK103-A
Pumping interface:KF40
Molecular pump:CY-600
Exhaust interface:KF16
Backing pump:rotary vane pump
Vacuum measurement:Compound vacuum gauge
Ultimate vacuum:1.0E-5Pa
Power supply:AC;220V 50/60Hz
Pumping rate:Molecular pump: 600L/S rotary vane pump: 1.1L/S
Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa
in 20 minutes
Power configuration
DC power supply*2;Max output power:DC 500W
Other parameters
Supply voltage:AC220V,50Hz
Overall size:600*650*1280 mm
Total power:2.5KW
Total Weight:About 300kg