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PRODUCT DESCRIPTION
1700C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer
Product Overview for 1700C CVD Tube Furnace
1700C series Gas controlled CVD tube furnace features intergrate two or three gas channels, mixed gas controlled system, high alumina ceramic tube with SS304 sealing flanges, heated by MoSi2
rods, Tmax 1700 degree C (1500C under high vacuum level). Microprocessor-based self-tuning PID provides excellent control with no overshooting and +/- 1 °C accuracy. Max vacuum level could be
reached to 10E-3 torr with molecular vacuum pump.
Main Features
Tmax 1700 °C
Electric heated, single heating zones, high temperature, vacuum tube furnace
Dual steel structure, non-Split furnace chamber to protect minium heat loss
Multiple atmosphere processes in a single cycle are available
Max Vacuum level achieve 10E-3 torr worked with molecular pump
Fiber-insulated chamber with powerful MoSi2 heating elemets ensure uniform temperature ensure uniform temperature
Shimaden PID temperature controller with programmable 30 segments
SS304 vacuum sealing flanges with valves and pressure meter included
Dual flanges support provides better sealing and longer tube life
Long life type B thermocouple
CE certified, standard
Ramping, Dwelling, Cooling Curves for 1700 Series Tube Furnaces
Safety Measures
Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when
the thermocouple is broken or malfunctions
Power failure protection resumes furnace operation right after the point of failure when power is reestablished
Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot
Technical
Specifications
Model No.
PTC D80/600/17
Heating zone
TWO heating length 300mm
Uniform temp zone: 120mm
Power supply
4KW AC208-240V, 50/60Hz, single phase
Working temperature
Tmax 1700°C (3092°F)
Continuously 1600°C (2912°F)
Temperature uniformity +/- 5C
Temperature controller
30 programmable segments for heating, cooling and dwelling.
Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
Over-temperature protection and alarm allow for operation without attendant(s).
+/- 1 ºC temperature accuracy.
Heating rate
≤10°C /min
Thermocouple
B type
Chamber lining
Mitsubishi raw material high alumina 1800 grade fiber board
Furnace tube
High purity mullite tube OD80mm, ID 72mm, tube length 900mm
Equips vacuum flanges with gas inlet and outlet valve
Vacuum flanges
Pair of hinged type SS304 flanges with needle valves
Water cold hinged type flange is available upon request at extra cost
Vaccum level
10^-1 torr by the mechanical pump
10^-3 Torr by a molecular pump
Atmosphere gas
Argon, Nitrogen etc
Heating element
Super 1800 grade MoSi2 heating element
Note: Heating elements are consumable, and not covered by warranty, we recommend to order extra set of heaters as
spareparts
Shipping info
Weight: 260kgs W1100xL650xH1200mm
Compliance
CE, ISO
Warranty
2 years limited warranty with lifetime technical support
Application
Notes
Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and
supervision
1700C tube furnaces with alumina tube are designed for use under vacuum and low pressure; 0.2 bars / 3 psi / 0.02 MPa
To minimize the cracking rate of the ceramic tubes, please change the position (mark four points on the tube) each batch
Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks
may be repaired with alumina coating
Size Comparison
Item name
PT D40/300/17
PT D60/300/17
PT D100/300/17
Heating length
300 mm
300 mm
300 mm
Tube size
OD40xL900mm
OD60xL900mm
OD100xL900mm
Power
220V/3KW
220V/4KW
220V/5KW
Furnace dimensions (LxWxH)
1030x500x800mm
1050x520x830mm
1100x580x850mm
Net Weight
150 KGS
170 KGS
290 KGS