Optical Coating Machine

Equipment Brief  IKS-OPT2700 is designed for large area optical film coating, It is electron-beam evaporative coating machine. The coating machine system is consist of vacuum chamber, vacuum pump, Vacuum detection and control, substrate heating system, electron beam evaporation system, ion source assisted deposition system, resistance evaporation system, film thickness monitoring system, working gas volume flow control system, work piece rotation system and automatic coating controlled by PLC. The evaporation material is commonly used of rare metals, like YF3(yttrium fluoride), F3Pr(praseodymium fluoride), Ge(germanium), ZnS(zinc sulfide), MgF2(magnesium fluoride), TiO2(titanium dioxide), SiO2(silicon dioxide),ZrO2(zirconia), Co(cobalt), Ga(gallium), Se(selenium)and other metals. Cu(Copper), Mo(molybdenum), Si(silicon), Ge(germanium)and other metals are commonly used in the optical materials of reflectors. It can be coating visible light color film, aluminum reflective film, AF anti-fingerprint film, low melting point organic film, visible light spectroscopic film, visible light anti-reflection film, etc Equipment Features 1. Product design, by perfect IKS technology and product performance seamless docking integration, to create reliable, stable Fixed, safe, intelligent coating system! 2. Vacuum acquisition, re-optimized design of the vacuum acquisition system, to meet the rapid and stable vacuum environment! 3. Evaporation source and ion source, reasonable layout and high quality processing technology, commissioning technology, to achieve the process automatic adjustment, electron beam innovative structure and accurate rate guarantee material deposition more accurate and stable!    4. Automatic operation control system, the new development of accurate and stable system! Simple setup, easy operation! Equipment  Parameters   Chamber Size Ф2700×H1670mm，10.5m3 Carousel 2650*H420mm Vacuum degree ultimate vacuum:6×10-4Pa(No load for 24 hours without heating) Weight 8000kg,Floor weight﹥1000kg/m2 Leak rate ＜4×10-3Pa×L/S(Helium leak checking) Temperature At room temperature to 250 ℃, the temperature uniformity ±5% Working Vacuum 6×10-3Pa(Automatic process start-up) Power Supply Three-Phase, 380V，50Hz，60-100KW Low Vacuum 10 minutes＜10Pa Water Cooling The flow of Chamber＞4000L/H,The flow of Pump＞1800L/H,The flow of Freezer＞1600L/H High Vacuum 6 minutes＜8×10-3Pa Warm Water Evaporation Source1800L/H,35-60℃ Vacuum measurement Whole-process monitoring and real-time point collection floor space L6×w5.5×H3.5m Application Eyeglasses, reflective mirror, mobile phone backboard, protective  cover, optical communication, optical display, etc