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Precise and reliable motion control with the same performance as Asyst SMIF
Transmission cycle s; Repositioning accuracy 0.127mm; The cleanliness grade is better than Class 1; The direction error is mm
Mature and stable Interlock system
Wafer traceability identification system SMART TAG
Integrated self-test diagnostics, as well as advanced diagnostic software, facilitate design and troubleshooting
Localization advantage
Short delivery time, stable supply
Local manufacturing capability, fast and flexible; Localization of core components fast response
